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Energy-dispersive X-ray spectroscopy (EDS) on SEM

pic27Applications of EDS:

  • Elemental composition of a point or area of interest
  • Elemental recognition and phase identification
  • Quantitative compositional analysis
  • Digital X-ray maps and line-scans
  • Analysis of particle samples

Energy resolution: Less than 127 eV (at Mn Ka)

  • Element detection range: Be(4) – Am(95)

 

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Ultra

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Merlin

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LEO

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Environmental